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공정 센서 드리프트 가속화와 불규칙적인 보수 주기가 존재하는 반도체 공정의 FDC를 위한 결합 인공 신경망 모델
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논문 기본 정보

Type
Proceeding
Author
김영주 (연세대학교) 이호엽 (연세대학교) 김창욱 (연세대학교)
Journal
Korean Institute Of Industrial Engineers 대한산업공학회 춘계공동학술대회 논문집 2019년 대한산업공학회 춘계공동학술대회 논문집 [3개 학회 공동주최]
Published
2019.4
Pages
3,210 - 3,227 (18page)

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공정 센서 드리프트 가속화와 불규칙적인 보수 주기가 존재하는 반도체 공정의 FDC를 위한 결합 인공 신경망 모델
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Research history (2)

2019

공정 센서 드리프트 가속화와 불규칙적인 보수 주기가 존재하는 반도체 공정의 FDC를 위한 결합 인공 신경망 모델
김영주 ,  이호엽 ,  김창욱 한국경영과학회 학술대회논문집 2019.04 Proceeding
공정 센서 드리프트 가속화와 불규칙적인 보수 주기가 존재하는 반도체 공정의 FDC를 위한 결합 인공 신경망 모델
김영주 ,  이호엽 ,  김창욱 대한산업공학회 춘계공동학술대회 논문집 2019.04 Proceeding
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UCI(KEPA) : I410-ECN-0101-2019-530-000563379