지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회 진공이야기 진공이야기 제5권 제3호
- 발행연도
- 2018.9
- 수록면
- 16 - 20 (5page)
- DOI
- 10.5757/vacmac.5.3.16
이용수
초록· 키워드
오류제보하기
Non Evaporable Getter (NEG) pumps have been developed in the 70’s and since then adopted by the industry, by research centres and laboratories and by large physics projects such as accelerators, synchrotrons or fusion reactors. NEG pumps permanently remove active gases (e.g. H2, H2O, CO, CO2, N2, 02) by a chemical reaction on the getter surface. They are very compact and vibration-free pumps able to deliver large pumping speed in a very small package and with minimal power requirement. Thanks to the development of the new ZAO® getter material, the use of NEG pumps can be further extended from UHV into the high vacuum (HV) regime, also including particle sensitive applications, such as electron microscopes, photocathodes or superconductive radio frequency cavities. 2AO® based NEG pump are therefore particularly suitable to meet the new vacuum challenges of modern vacuum systems and equipment in term of miniaturization, cleanliness, ease of use and compactness. In the present paper the main features and performances of getter pumps will be reviewed and discussed with a focus on the most recent advances in term of materials, applications and design. Examples of use of NEG pumps and NEG/sputter ion pump combination in a broad range of applications will be also provided.
목차
서론
ZAO기반 NEG펌프의 주요 특성
펌프의 구성
ZAo 기반 펌프의 적용사례
결론
References
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UCI(KEPA) : I410-ECN-0101-2019-420-000468116