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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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We investigated the effect of capacitively coupled Ar plasma treatment on contact resistance (R<SUB>c</SUB>) and channel sheet resistance (R<SUB>sh</SUB>) of graphene field effect transistors (FETs), by varying their channel length in the wide range from 200 nm to 50 μm which formed the transfer length method (TLM) patterns. When the Ar plasma treatment was performed on the long channel (10 ~ 50 μm) graphene FETs for 20 s, R<SUB>c</SUB> decreased from 2.4 to 1.15 kΩ·μm. It is understood that this improvement in R<SUB>c</SUB> is attributed to the formation of sp³ bonds and dangling bonds by the plasma. However, when the channel length of the FETs decreased down to 200nm, the drain current (I<SUB>d</SUB>) decreased upon the plasma treatment because of the significant increase of channel R<SUB>sh</SUB> which was attributed to the atomic structural disorder induced by the plasma across the transfer length at the edge of the channel region. This study suggests a practical guideline to reduce R<SUB>c</SUB> using various plasma treatments for the R<SUB>c</SUB> sensitive graphene and other 2D material devices, where R<SUB>c</SUB> is traded off with Rsh.
목차
Abstract
1. Introduction
2. Results and Discussion
3. Conclusion
References
참고문헌 (33)
참고문헌 신청
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J. A. Robinson, M. LaBella, M. Zhu, M. Hollander, R. Kasarda, Z. Hughes, K. Trumbull, R.Cavalero, D. Snyder, Contacting graphene, Appl. Phys. Lett., 98 (2011) 053103.
W. Liu, J. Wei, X. Sun, H. Yu, A study on graphene—metal contact, Crystals, 3 (2013) 257- 274.
J. H. Seol, I. Jo, A. L. Moore, L. Lindsay, Z. H. Aitken, M. T. Pettes, X. Li, Z. Yao, R. Huang, D. Broido, Two Dimensional Phonon Transport in Supported Graphene, Science, 328 (2010) 213- 216.
K. N. Parrish, D. Akinwande, Impact of contact resistance on the transconductance and linearity of graphene transistors, Appl. Phys. Lett., 98 (2011) 183505.
J. A. Robinson, M. LaBella, M. Zhu, M. Hollander, R. Kasarda, Z. Hughes, K. Trumbull, R.Cavalero, D. Snyder, Contacting graphene, Appl. Phys. Lett., 98 (2011) 053103.
W. Liu, J. Wei, X. Sun, H. Yu, A study on graphene—metal contact, Crystals, 3 (2013) 257- 274.
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UCI(KEPA) : I410-ECN-0101-2016-581-002873339