Gradual control of cell adhesion on films in plasma enhanced chemical vapor deposition by variation of tetrakis(trimethylsilyloxy)silane and cyclohexane precursors

Sungyool KWON ,  Wonjin BAN ,  Jisu PARK 외 4명

한국진공학회 학술발표회초록집

2016 .08

Tetrakis(trimethylsilyloxy)silane와 cyclohexane 혼합 전구체를 사용한 플라즈마중합박막에서의 mouse embryonic fibroblast cell과 bovine aortic endothelial cell의 동향

권성률 ,  반원진 ,  남재현 외 4명

한국진공학회 학술발표회초록집

2015 .08

Plasma-enhanced atomic layer deposition of silicon nitride thin films using bis(diethylamino)silane

Jae-Min PARK ,  Yong-Ho NOH ,  June HWANG 외 1명

한국진공학회 학술발표회초록집

2016 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Tin monosulfide thin films grown by atomic layer deposition using tetrakis(dimethylamino)tin for photovoltaic applications

Sang-Ju LEE ,  Shi-Joon SUNG ,  Yong Chan CHOI 외 2명

한국진공학회 학술발표회초록집

2016 .08

Enhanced Anti-reflective Effect of SiN_x/SiO_x/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

Min-Jun Choi ,  O Dae Kwon ,  Sang Dae Choi 외 3명

Applied Science and Convergence Technology

2016 .07

Plasma Properties Data Center Activities for Plasma Application in the National Fusion Research Institute

송미영 ,  김대철 ,  권득철 외 16명

한국진공학회 학술발표회초록집

2019 .08

Fabrication and Characterization of Plasma polymerized PEG on Stainless Beads by using Plasma-enhanced Chemical Vapor Depostion

Youngmi Kim ,  Jisoo Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2017 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구

탁현우 ,  문룡 ,  성다인 외 3명

한국진공학회 학술발표회초록집

2020 .02

Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma

Jonggu Han ,  Rodolphe Mauchauffé ,  Se Youn Moon

Applied Science and Convergence Technology

2023 .09

Low temperature growth of nanocrystalline diamond thin film by surface wave plasma chemical vapor deposition with various working pressures

Jong Seok KIM ,  Yeong Min PARK ,  Dae Weon KIM 외 6명

한국진공학회 학술발표회초록집

2016 .08

Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell

Dongsung LEE

한국진공학회 학술발표회초록집

2016 .08

Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma

김태환 ,  이승환

한국진공학회 학술발표회초록집

2019 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Microwave Plasma Source Optimization for Thin Film Deposition Applications

Mahmoud A. I. Elga ,  hy

Applied Science and Convergence Technology

2022 .03

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Effect of hybrid plasma source on O radical generation in oxygen plasma

Kwan-Yong Kim ,  Kyung-Hyun Kim ,  Young-Hun Hong 외 2명

한국진공학회 학술발표회초록집

2018 .08

Flexible Plasma Sheets

Guangsup Cho ,  Yunjung Kim

Applied Science and Convergence Technology

2018 .03