지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전자공학회 JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE Journal of Semiconductor Technology and Science Vol.14 No.6
- 발행연도
- 2014.12
- 수록면
- 733 - 740 (8page)
이용수
초록· 키워드
오류제보하기
A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 ㎷ / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be 268 μV<SUB>rms</SUB> in 0.5 ㎐ to 50 ㎐, which is 41.2% smaller than conventional CTIA.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. MICRO PIRANI GAUGE
Ⅲ. LOW NOISE CDS-CTIA
Ⅳ. PERFORMANCE EVALUATION
Ⅴ. CONCLUSIONS
REFERENCES
참고문헌 (10)
참고문헌 신청
1. [학술대회논문] - Lee, S-H. / 2009 / A low-power oven-controlled vacuum package technology for high-performance MEMS / Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
2. [학술지(정기간행물)] - Xiao, Bin / 2011 / Integrated micro Pirani gauge based hermetical package monitoring for uncooled VO x bolometer FPAs / Microsystem technologies 17 (1) : 115 ~ 125
3. [학술대회논문] - Yon, Jean-Jacques / 2008 / Latest amorphous silicon microbolometer developments at LETI-LIR / SPIE Defense and Security Symposium. International Society for Optics and Photonics
4. [기타자료] - Kim, Y. / 2013 / Uncooled microbolometer arrays with high responsivity using meshed leg structure : 1 ~ 1
5. [학술지(정기간행물)] - Jung, Ho / 2014 / Design and characteristics of a-Sibased micro-bolometers with shared-anchor structure in vacuum packaged systems / Microsystem Technologies 20 (4-5) : 899 ~ 905
2. [학술지(정기간행물)] - Xiao, Bin / 2011 / Integrated micro Pirani gauge based hermetical package monitoring for uncooled VO x bolometer FPAs / Microsystem technologies 17 (1) : 115 ~ 125
3. [학술대회논문] - Yon, Jean-Jacques / 2008 / Latest amorphous silicon microbolometer developments at LETI-LIR / SPIE Defense and Security Symposium. International Society for Optics and Photonics
4. [기타자료] - Kim, Y. / 2013 / Uncooled microbolometer arrays with high responsivity using meshed leg structure : 1 ~ 1
5. [학술지(정기간행물)] - Jung, Ho / 2014 / Design and characteristics of a-Sibased micro-bolometers with shared-anchor structure in vacuum packaged systems / Microsystem Technologies 20 (4-5) : 899 ~ 905
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UCI(KEPA) : I410-ECN-0101-2016-569-001112486