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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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We report the design, fabrication of a Si₃N₄ probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM tip for imaging or a writing tip for nano patterning. For this, the dual tip probe is fabricated using low residual stress Si₃N₄ material with LPCVD deposition and MEMS fabrication process. On the basis of FEM analysis we show that the functionality of dual tip probe for imaging is dependent on the dimensions of dual tip probe, and high ratio of widths of beam areas is preferred to minimize curvature variation on probe.
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Abstract
1. 서론
2. 본론
3. 결론
References
참고문헌 (17)
참고문헌 신청
1. [학술지(정기간행물)] - S. Kramer / 2003 / / Chem. Rev 103 : 4367 ~
2. [학술지(정기간행물)] - X. Wang / 2003 / / Langmuir 19 : 8951 ~
3. [학술지(정기간행물)] - J. Zou / 2004 / / J. Micromech. Microeng 14 : 204 ~
4. [학술지(정기간행물)] - D. S. Ginger / 2004 / / Angew. Chem. Int. Ed 43 : 1433 ~
5. [학술지(정기간행물)] - K. Salaita / 2007 / / Nature 2 : 145 ~
2. [학술지(정기간행물)] - X. Wang / 2003 / / Langmuir 19 : 8951 ~
3. [학술지(정기간행물)] - J. Zou / 2004 / / J. Micromech. Microeng 14 : 204 ~
4. [학술지(정기간행물)] - D. S. Ginger / 2004 / / Angew. Chem. Int. Ed 43 : 1433 ~
5. [학술지(정기간행물)] - K. Salaita / 2007 / / Nature 2 : 145 ~
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UCI(KEPA) : I410-ECN-0101-2016-581-001003888