지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2014.11
- 수록면
- 2,432 - 2,437 (6page)
이용수
초록· 키워드
오류제보하기
A new measurement system is proposed that can detect five-degree-of-freedom (five-DOF) error motions of a linear stage with high sensitivity. The system divided into a moving target part and a stationary detection part. The moving target part, which is composed of three retro-reflectors, is mounted on a carriage of a linear stage. The stationary detection part is composed of three laser sources, ball-lenses, and PSDs, and placed on a reference table. Three parallel laser beams from laser sources is reflected at three retro-reflectors, and then arrived at the PSDs after passing through the ball-lenses. Relative position changes of the retro-reflectors by the multi-DOF motions of the moving target part shift the optical paths of the reflected beams, and the PSDs detect the displacement of the laser beam. The ball-lenses play a pivotal role in displacement magnification of the beam spot on PSDs. In this paper, the relationships between the output of the three PSDs and the five-DOF motions of the moving target part are derived, and the system model is defined from it. Based on the ray-tracing method, simulations are performed to estimate the proposed measurement system’s performances. The results show that the proposed method is useful to precisely measure the error motions of linear stages.
목차
Abstract
1. 서론
2. 측정원리
3. 모의 측정실험
4. 결론
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