지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2014.11
- 수록면
- 1,256 - 1,259 (4page)
이용수
초록· 키워드
오류제보하기
The precise alignment of two glasses is a typical procedure in LCD or OLED assembly. For this process, the vision system evaluates position errors between glasses by detecting the pattern markers printed in each glass and the X, Y, R stage moves one glass to another in order to correct the error. Commonly used 2-D moving stage, called the "4-Axes Parallel Stage", has 3 motors at each corner which respectively move in X1, X2, Y or X, Y1, Y2 direction. In this stage, 3 axes" motions combine to make the X, Y, R motion. Therefore the required 3 axes feed need to be calculated from the X, Y, R errors using inverse kinematics. But the inverse kinematics conversion has too many possible cases because of the diversity in stage configuration such as the motors" positions and directions. In this work, the multi purpose stage is designed to transform into any configuration that can occur in practical application. When the new configuration stage is designed, inverse kinematics conversion is derived and verified in desktop environment using multi purpose parallel stage. Through this work, stage control system can be developed more efficiently.
목차
Abstract
1. 서론
2. 4축 병렬 스테이지
3. 만능 4축 병렬 스테이지
4. 결론
참고문헌
참고문헌 (0)
참고문헌 신청이 논문의 저자 정보
최근 본 자료
댓글(0)
0