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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2013.12
- 수록면
- 3,923 - 3,928 (6page)
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초록· 키워드
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We demonstrated an extremely easy and cost-effective nanochnnel fabrication method based on hot embossing process and polyethylene glycol (PEG) mediated bonding method. Master mold for hot embossing process was fabricated on silicon wafer using negative electron beam lithography and reactive ion etching process. Nanogroove array were patterned in a small piece of poly(methyl methacrylate) (PMMA) plate using hot embossing process and were covered by bonding with 170um thick microscope coverslip. Before nanogrooves were sealed with coverslip, nanopatterned PMMA plate was coated with monolayer of polyethylene glycol and exposed to oxygen plasma. Hot embossing conditions such as force, temperature, and pressing time were optimized at 0.92N, 125±2°C and 30 min. Using our method, nanochannels of four different dimensions (200(h) × 400(w), 200(h) × 200(w), 100(h) × 100(w), 100(h) × 70(w)) were fabricated and the dimension of each nanochannel was examined using atomic force microscopy. Also PEG mediated bonding showed excellent water tight performance.
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Abstract
1. 서론
2. Method
3. 결과
4. 결론
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