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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2013.12
- 수록면
- 2,192 - 2,196 (5page)
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초록· 키워드
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This study investigated the effect of polymer molecular size which varies with the molecular weight on the deformation of thermoplastic polymer. Polystyrene of different molecular weights with varying orders of magnitude were deposited on the substrate, and then the thermal nanoimprint lithography experiments were carried out using stamps of various pattern sizes in order to observe the polymer deformation. The results show that the radius of gyration should be smaller than the size of the cavity for fine pattern transfer, and the degree of filling decreases as the relative size of the radius of gyration to the cavity width increases, indicating that the molecular weight of the polymer chains is important variable in nano-scale deformation. Results also show that the polymers have similar value of the radius of gyration with the previous solvent status even after the solvent was evaporated through spin-coating process.
목차
Abstract
1. Introduction
2. Experimental Method
3. Results & Discussion
4. Conclusion
References
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