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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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Lead zirconate titanate (PZT) thick films with a thickness of 10-20 μm were fabricated on silicone substrates using an aerosol deposition method. The starting powder, which had diameters of 1-2 μm, was observed using SEM. The average diameter (d50) was 1.1 μm. An XRD analysis showed a typical perovskite structure, a mixture of the tetragonal phase and rhombohedral phase. The as-deposited film with nano-sized grains had a fairly dense microstructure without cracks. The deposited film showed a mixture of an amorphous phase and a very fine crystalline phase by diffraction pattern analysis using TEM. The as-deposited films on silicon were annealed at a temperature of 700℃. A 20-μm thick PZT film was torn out as a result of the high compressive stress between the PZT film and substrate.
목차
ABSTRACT
1. 서론
2. 실험 방법
3. 실험결과 및 고찰
4. 결론
References
참고문헌 (13)
참고문헌 신청
1. [학술지(정기간행물)] - Akedo, J. / 1999 / Microstructure and Electrical Properties of Lead Zirconate Titanate Thick Films Deposited by Aerosol Deposition Method. Jpn / J Appl Phy 38 : 5397 ~ 5401
2. [학술지(정기간행물)] - Chen, H. D. / 1995 / Dielectric, Ferroelectric, and Piezoelectric Properties of Lead Zirconate Titanate Thick Films on Silicon Substrates / J. Appl. Phys 77 : 3349 ~ 3353
3. [학술지(정기간행물)] - Corker, D. L. / 2002 / PZTcompositeFerroelectric Thick Films / J. Euro. Ceram. Soc 22 : 383 ~ 390
4. [학술지(정기간행물)] - Evans, A. G. / 1995 / The Thermomechanical Integrity of Thin Films and Multilayers / Acta. Metall. Mater 43 (7) : 2507 ~ 2530
5. [학술지(정기간행물)] - Haertling, G. H. / 1999 / Ferroeletric Ceramics : History and Technology / J. Am. Ceram. Soc 84 (3) : 797 ~ 818
2. [학술지(정기간행물)] - Chen, H. D. / 1995 / Dielectric, Ferroelectric, and Piezoelectric Properties of Lead Zirconate Titanate Thick Films on Silicon Substrates / J. Appl. Phys 77 : 3349 ~ 3353
3. [학술지(정기간행물)] - Corker, D. L. / 2002 / PZTcompositeFerroelectric Thick Films / J. Euro. Ceram. Soc 22 : 383 ~ 390
4. [학술지(정기간행물)] - Evans, A. G. / 1995 / The Thermomechanical Integrity of Thin Films and Multilayers / Acta. Metall. Mater 43 (7) : 2507 ~ 2530
5. [학술지(정기간행물)] - Haertling, G. H. / 1999 / Ferroeletric Ceramics : History and Technology / J. Am. Ceram. Soc 84 (3) : 797 ~ 818
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UCI(KEPA) : I410-ECN-0101-2015-550-001076013