지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.10
- 수록면
- 831 - 836 (6page)
이용수
이 논문의 연구 히스토리 (3)
- 이 논문의 후속연구가 궁금하신가요?
- 연관 학술논문 또는 학술발표를 통해 보다 발전된 연구결과를 확인하실 수 있습니다.
- 이 논문의 연구 히스토리 확인하기
초록· 키워드
오류제보하기
This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using thePCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need forhigh cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.
목차
ABSTRACT
1. 서론
2. AFM 기반 TNL의 원리
3. 실험 방법
4. 실험 결과
5. 결론
References
참고문헌 (8)
참고문헌 신청
1. [학술지(정기간행물)] - Dai, H. / 1996 / Nanotubes as Nanoprobes in Scanning Probe Microscopy / Nature 384 : 147 ~ 150
2. [학술지(정기간행물)] - Yavas, O. / 2000 / Maskless Fabrication of Field-Emitter Array by Focused Ion and Electron Beam / Appl. Phys. Lett. 76 : 3319 ~ 3321
3. [학술지(정기간행물)] - Park, J. W. / 2010 / Micro/Nano Surface Modification on Brittle Materials by Tribo Nanolithography Using PCD Tool / Nanotechnology 10 : 4440 ~ 4447
4. [학술지(정기간행물)] - Kawasegi, N. / 2006 / Nanomachining of Silicon Surface Using Atomic Force Microscope with Diamond Tip / J. Manuf. Sci. Eng. 128 : 723 ~ 729
5. [학술지(정기간행물)] - Park, J. W. / 2004 / Mechanical approach to nanomachining of silicon using oxide characteristics based on tribo nanolithography (TNL) in KOH Solution / J. Manuf. Sci. Eng.-Trans. ASME 124 : 801 ~ 806
2. [학술지(정기간행물)] - Yavas, O. / 2000 / Maskless Fabrication of Field-Emitter Array by Focused Ion and Electron Beam / Appl. Phys. Lett. 76 : 3319 ~ 3321
3. [학술지(정기간행물)] - Park, J. W. / 2010 / Micro/Nano Surface Modification on Brittle Materials by Tribo Nanolithography Using PCD Tool / Nanotechnology 10 : 4440 ~ 4447
4. [학술지(정기간행물)] - Kawasegi, N. / 2006 / Nanomachining of Silicon Surface Using Atomic Force Microscope with Diamond Tip / J. Manuf. Sci. Eng. 128 : 723 ~ 729
5. [학술지(정기간행물)] - Park, J. W. / 2004 / Mechanical approach to nanomachining of silicon using oxide characteristics based on tribo nanolithography (TNL) in KOH Solution / J. Manuf. Sci. Eng.-Trans. ASME 124 : 801 ~ 806
이 논문의 저자 정보
최근 본 자료
댓글(0)
0