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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2009.12
- 수록면
- 534 - 549 (16page)
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초록· 키워드
오류제보하기
As the thin film technology has emerged in various fields, adhesion of the film interface becomes an important issue in terms of the longevity and durability of thin film devices. Diverse nondestructive methods utilizing acoustic techniques have been developed to assess the interfacial integrity. As an effective technique based on the ultrasonic wave focusing and the surface acoustic wave(SAW) generation, scanning acoustic microscopy(SAM) has been investigated for adhesion evaluation. Visualization of film microstructures and quantification of adhesion weakness levels by SAW dispersion are the recent achievements of SAM. To overcome the limitations in the theoretical dispersion model only suitable for perfectly elastic and isotropic materials, a new model has been more recently developed in consideration of film anisotropy and viscoelasticity and applied to the adhesion evaluation of polymeric films fabricated on semiconductive wafers.
목차
Abstract
1. Introduction
2. Overviews on Thin film Fabrication
3. Adhesion Evaluation of Thin Films
4. Research Directions for the Film Adhesion Evaluation
5. Concluding Remarks
References
참고문헌 (46)
참고문헌 신청
1. [단행본] - Achenbach, J. D. / 1995 / Measuring Thin Film Elastic Constants by Line-Focus Acoustic Microscopy. in : Advances in Acoustic Microscopy / Plenum Press : 153 ~ 208
2. [학술대회논문] - Addison Jr., R. C. / 1986 / Techniques for the Characterization of Film Adhesion / Proceedings of IEEE Ultrasonic Symposium : 775 ~ 782
3. [학술대회논문] - Addison, R. C. / 1988 / Correlation of Thin-Film Bond Compliance and Bond Fracture Resistance / Review of Progress in Quantitative Nondestructive Evaluation : 1185 ~ 1194
4. [학술지(정기간행물)] - Aizawa, T. / 1992 / Materials Evaluation of PVD/CVD Coated WC/Co Superhard Alloys by the Ultrasonic Microscopy / Nondestructive Testing and Evaluation 8-9 : 999 ~ 1011
5. [학술지(정기간행물)] - Aizawa, T. / 1993 / Nondestructive Quality Assurance of PVD/CVD Ceramic Coated WC/C0 Cermets / Ceramic Coatings 44 : 111 ~ 132
2. [학술대회논문] - Addison Jr., R. C. / 1986 / Techniques for the Characterization of Film Adhesion / Proceedings of IEEE Ultrasonic Symposium : 775 ~ 782
3. [학술대회논문] - Addison, R. C. / 1988 / Correlation of Thin-Film Bond Compliance and Bond Fracture Resistance / Review of Progress in Quantitative Nondestructive Evaluation : 1185 ~ 1194
4. [학술지(정기간행물)] - Aizawa, T. / 1992 / Materials Evaluation of PVD/CVD Coated WC/Co Superhard Alloys by the Ultrasonic Microscopy / Nondestructive Testing and Evaluation 8-9 : 999 ~ 1011
5. [학술지(정기간행물)] - Aizawa, T. / 1993 / Nondestructive Quality Assurance of PVD/CVD Ceramic Coated WC/C0 Cermets / Ceramic Coatings 44 : 111 ~ 132
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