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논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2012.11
- 수록면
- 2,848 - 2,852 (5page)
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초록· 키워드
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Composition analysis of as-deposited yttrium doped barium zirconate (BZY) films was conducted using X-ray photoelectron spectroscopy (XPS). The BZY films were prepared by pulsed laser deposition (PLD) with variations of target-to-substrate distance (T-S Dis.) and ambient oxygen pressure (PO<SUB>2,amb</SUB>). As a result, barium loss in the PLD was observed from all of the deposited BZY films even though a stoichiometric PLD BZY target was used. It is confirmed that the barium deficiency decreased with increasing the PO<SUB>2,amb..</SUB> The T-S Dis. effect on the barium deficiency was not discernible in the targeted range but the relation between the T-S Dis. and barium deficiency was confirmed from an expended experiment.
목차
Abstract
1. 서론
2. 실험방법
3. 결과 및 고찰
4. 결론
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UCI(KEPA) : I410-ECN-0101-2014-550-000184576