지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2012.11
- 수록면
- 2,117 - 2,122 (6page)
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초록· 키워드
오류제보하기
A turbomolecular pump (TMP) is one of the most frequently used one to generate and maintain high and clean vacuum in the industry. In this paper, a 3D geometric modeling for the TMP rotor is discussed. For the modeling of the TMP rotors, the most significant part is to determine the geometry of rotor blades in order to achieve the necessary pumping speed and compression ratio. So far many types of TMP rotor blades have been proposed in its cross-sectional shape and twist in the longitudinal direction. We consider three cases among the categories: (1) rectangular cross-section and without longitudinal twist; (2) rectangular cross-section and with longitudinal twist; (3) curved cross-section and without longitudinal twist; and (4) curved cross-section and with longitudinal twist. The 3D modeling was carried out in Pro/ENGINEER and the key geometric modeling method was established for the each cases. In addition, important geometric dimensions for the TMP rotor are parameterized so that design sensitivity analysis and optimization for pumping speed, compression ratio, and structural responses can be performed efficiently.
목차
Abstract
1. 서론
2. TMP 의 작동원리
3. TMP 의 설계변수
4. TMP Rotor 모델링 기법
5. 고찰
6. 결론
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UCI(KEPA) : I410-ECN-0101-2014-550-000182734