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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2013.2
- 수록면
- 77 - 84 (8page)
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초록· 키워드
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In this paper, we review two-dimensional measuring methods referring to target patterns. The patterns consist of two linearly-repeated patterns or is designed repeatedly in two-dimension. The repeated properties are reflectivity, refractivity, air-gapping distance, capacitance, magnetic reluctance, electrical resistance and sloping gradient, etc. However, the optical methods are generally used for high speed processing and density, and their encoding principles are treated here. In case of two-dimensional pattern, as there is not inherently error between single units encoding the pattern except for the metrology frame errors, the end-effector position of an object accompanying the pattern can be measured with respect of the global frame without via error. Therefore, it is regarded as a substitute for laser interferometer with severe environmental constraints and has been applied to the high-accurate planar actuator.
목차
Abstract
1. 서론
2. 병렬 구조의 선형 패턴 인코딩 방법
3. 액추에이터 플랫폼과의 통합 구현
4. 평면형 2차원 참조 패턴 사례
5. 결론
References
참고문헌 (28)
참고문헌 신청
1. [학술지(정기간행물)] - Gao, W. / 2004 / A Surface Motor-driven Planar Motion Stage Integrated with an $XY\theta z$ Surface Encoder for Precision Positioning / Precision Engineering 28 (3) : 329 ~ 337
3. [학술지(정기간행물)] - Kim, W. J. / 1998 / High-precision Magnetic Levitation Stage for Photolithography / Precision Engineering 22 (2) : 66 ~ 77
4. [학술지(정기간행물)] - Holmes, M. / 2000 / The Long-range Scanning Stage : A Novel Platform for Scanned-probe Microscopy / Precision Engineering 24 (3) : 191 ~ 209
5. [학술지(정기간행물)] - Jung, K. S. / 2002 / Study on a Novel Contact-Free Planar System using Direct Drive DC Coils and Permanent Magnets / IEEE/ASME Trans. on Mechatronics 7 (2) : 35 ~ 43
6. [학술지(정기간행물)] - Blakley, J. J. / 2000 / Two-dimensional Position Sensing using Absolute-Type Encoder Scheme Employing Pseudo-random Binary Arrays / Electronics Letters 36 (15) : 1277 ~ 1278
3. [학술지(정기간행물)] - Kim, W. J. / 1998 / High-precision Magnetic Levitation Stage for Photolithography / Precision Engineering 22 (2) : 66 ~ 77
4. [학술지(정기간행물)] - Holmes, M. / 2000 / The Long-range Scanning Stage : A Novel Platform for Scanned-probe Microscopy / Precision Engineering 24 (3) : 191 ~ 209
5. [학술지(정기간행물)] - Jung, K. S. / 2002 / Study on a Novel Contact-Free Planar System using Direct Drive DC Coils and Permanent Magnets / IEEE/ASME Trans. on Mechatronics 7 (2) : 35 ~ 43
6. [학술지(정기간행물)] - Blakley, J. J. / 2000 / Two-dimensional Position Sensing using Absolute-Type Encoder Scheme Employing Pseudo-random Binary Arrays / Electronics Letters 36 (15) : 1277 ~ 1278
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