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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2012.3
- 수록면
- 127 - 133 (7page)
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초록· 키워드
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This paper considers the preventive maintenance scheduling problem of the cluster tool which is one of the most important manufacturing equipments in the next-generation semiconductor production environment. We define a random process that expresses the successive amount of chemicals accumulating inside the tool. Based on the renewal theory, we find the expected value and probability distribution of the time that the amount of accumulated chemicals exceeds a predetermined level. For a given probability that the accumulated chemicals exceeds the predetermined level we present a method to obtain the number of chamber operations to perform the preventive maintenance of that chamber. In addition, a method to get the preventive maintenance schedule for the whole cluster tool is presented. A numerical example is provided to illustrate our method.
목차
1. 서론
2. 클러스터 툴과 관련연구
3. 클러스터 툴 예방유지보수 모형
4. 수치 예
5. 결론
참고문헌
참고문헌 (9)
참고문헌 신청
1. [학술지(정기간행물)] - Aized, T / 2010 / delling and Analysis of Multiple Cluster Tools System with Random Failures Using Colored Petri Net / The International Journal of Advanced Manufacturing Technology 50 : 897 ~ 906
2. [보고서] - Draina, J / 2006 / ISMI 300 Prime/450mm Industry Briefing
3. [학위논문] - Dummler, M / 2004 / Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing / 박사 / University of Wuerzburg
4. [단행본] - Heyman, D. P / 1982 / Stochastic Models in Operations Research / McGraw-Hill
5. [학술지(정기간행물)] - Jose, A. R.-H. / 2010 / Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies / IEEE Transaction on Semiconductor Manufacturing 23 (3) : 477 ~ 489
2. [보고서] - Draina, J / 2006 / ISMI 300 Prime/450mm Industry Briefing
3. [학위논문] - Dummler, M / 2004 / Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing / 박사 / University of Wuerzburg
4. [단행본] - Heyman, D. P / 1982 / Stochastic Models in Operations Research / McGraw-Hill
5. [학술지(정기간행물)] - Jose, A. R.-H. / 2010 / Optimal Preventive Maintenance Scheduling in Semiconductor Manufacturing Systems: Software Tool and Simulation Case Studies / IEEE Transaction on Semiconductor Manufacturing 23 (3) : 477 ~ 489
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UCI(KEPA) : I410-ECN-0101-2013-530-003634535