지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
초록· 키워드
오류제보하기
The automated material handling systems today are playing ever more important roles in semiconductor/LCD fabrication facilities. Recently they became more flexible, intelligent, and speedy than in the past. The facilities have been fully automated because the size and weight of the unit loads used in the facilities were being increased beyond the limits that a human operator can handle. This research develops an efficient procedure to streamline the delivery of unit loads by the automated material handling system (AMHS). For this task, the research employs the event scheduling theory that has been successfully used in the both academia and industry. The developed procedure was applied to an actual LCD fabrication facility and improved the performance of an existing material handling system.
목차
Abstract
1. 서론
2. 연구배경
3. 우선순위결정 과정
4. 적용 결과
5. 결론 및 향후 연구과제
참고문헌
참고문헌 (18)
참고문헌 신청
1. [학술지(정기간행물)] - Lee, Y.H / 2001 / Supply Chain Model for the Semiconductor Industry of Global Market / Journal of Systems Integration 10 (3) : 189 ~ 206
2. [학술지(정기간행물)] - Chung, S.L / 2004 / Fabulous MESs and C/Cs：An overview of semiconductor fab automation / IEEE Robotics and Automation Magazine : 8 ~ 18
3. [학술대회논문] - Campbell, P.L / 1997 / Overhead Intrabay Automation and Microstocking-a virtual fab case study / Proceedings of IEEE/ SEMI Advanced Semiconductor Manufacturing Conference : 368 ~ 372
4. [학술대회논문] - Weiss, M / 1997 / 300 Fab Automation Technology options and selection criteria / IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 373 ~ 379
5. [학술지(정기간행물)] - Cardarelli, G / 1996 / Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab / Robotics and Computer-Integrated Manufacturing 12 (3) : 227 ~ 234
2. [학술지(정기간행물)] - Chung, S.L / 2004 / Fabulous MESs and C/Cs：An overview of semiconductor fab automation / IEEE Robotics and Automation Magazine : 8 ~ 18
3. [학술대회논문] - Campbell, P.L / 1997 / Overhead Intrabay Automation and Microstocking-a virtual fab case study / Proceedings of IEEE/ SEMI Advanced Semiconductor Manufacturing Conference : 368 ~ 372
4. [학술대회논문] - Weiss, M / 1997 / 300 Fab Automation Technology options and selection criteria / IEEE/SEMI Advanced Semiconductor Manufacturing Conference : 373 ~ 379
5. [학술지(정기간행물)] - Cardarelli, G / 1996 / Performance analysis of automated interbay material-handling and storage systems for large Wafer Fab / Robotics and Computer-Integrated Manufacturing 12 (3) : 227 ~ 234
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UCI(KEPA) : I410-ECN-0101-2013-325-001670321