지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
이용수
초록· 키워드
오류제보하기
In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210㎐, respectively. Driving mode resonance frequency of 7,180㎐ was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6㎜ⅹ6㎜ and the thickness of the silicon device layer is 50㎛. Despite the driving mode resonance frequency decrease of 2.8㎑ and frequency shift of 176㎐ from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768㎐. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008㏈/㎐.
목차
Abstract
1. 서론
2. 자이로스코프 설계
3. 제작 결과
4. 측정 결과
5. 결론
참고문헌
저자소개
참고문헌 (23)
참고문헌 신청
A. Lawrence / 1993 / Modern Inertial Technology: Navigation, Guidance, and Control / Springer-Verlag
J. S. Derkvisk / 1993 / Micromachined Gyroscope / Tech. Dig. The 7th Internatioal Conference on Solid-State Sensors and Actuators :638~641
J. S. Derkvisk / 1994 / Micromachined Gyroscope / Sensors and Actuators A 43:65~71
1999 / Microstructure & Microsystem Technology Application & Market 1997-2002 :163
P. H. Savet / 1961 / GYROSCOPES: Theory and Design / McGRAW-HILL
J. S. Derkvisk / 1993 / Micromachined Gyroscope / Tech. Dig. The 7th Internatioal Conference on Solid-State Sensors and Actuators :638~641
J. S. Derkvisk / 1994 / Micromachined Gyroscope / Sensors and Actuators A 43:65~71
1999 / Microstructure & Microsystem Technology Application & Market 1997-2002 :163
P. H. Savet / 1961 / GYROSCOPES: Theory and Design / McGRAW-HILL
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UCI(KEPA) : I410-ECN-0101-2013-560-000312354