지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술대회자료
- 저자정보
- 발행연도
- 2011.5
- 수록면
- 3,001 - 3,004 (4page)
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초록· 키워드
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High voltage pulse modulator of hard tube type has been developed for plasma source ion implantation (PSII). In this modulator, the crowbar switch is required for the excellent performance of PSII process which is different from conventional PSII. In order to reduce the falling time of pulse, the crowbar switch is used to PSII system. The arc response time for steady operation was designed with 500 ㎱. The current capacity is 120 A during the pulse at an output voltage of 60 ㎸. The total pulse length is varied from 3 to 12 ㎲ under a maximum repetition rate is 2 ㎑. The maximum pulse duty is 0.012. The average power is 40 ㎾. In this article, we introduce the various type of modulator for PSII and show the performance of the developed modulator.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. PULSEMODULATOR FOR PSII
Ⅲ. DEVELOPMENT OF PULSE MODULATOR
Ⅳ. CONCLUSIONS
ACKNOWLEDGMENT
REFERENCES
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UCI(KEPA) : I410-ECN-0101-2013-560-000303075