본 연구에서는 CVD 방법으로 성장된 그래핀의 마찰 특성을 알아보기 위해 마이크로트라이보미터를 이용하여 마찰력을 측정하였으며, SiO₂ 표면에서 측정된 마찰력과 비교하였다. 실험 결과, SiO₂ 기판 위에 코팅된 ... 전체 초록 보기
Surface forces, such as adhesion and friction forces, are crucial in the fabrication and operation of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) as well as in the nanofabrication processes such as nanoimprint lithography and transfer assembly process. Various lubricant materials, patterns, and surface treatment processes have been developed for control of the interfacial forces and lubrication between contacting surfaces. Graphite ... 전체 초록 보기