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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2011.4
- 수록면
- 104 - 109 (6page)
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I present a method of aspheric surface profile measurement using 2nd derivative of local area profile. This method is based on the principle of curvature sensor which measures the local 2nd derivative under test along a line. The profile is then reconstructed from the data on the each point. Unlike subaperture-stiching method and slope detection method, 2nd derivative method has strong points from a geometric point of view in measuring the aspheric surface profile. The second derivative terms of surface profile is an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.
목차
ABSTRACT
1. 서론
2. 측정이론
3. 측정시스템
4. 측정 결과
5. 결론
후기
참고문헌
참고문헌 (7)
참고문헌 신청
1. [학술지(정기간행물)] - I. Weingartner / 2001 / Measurement of steep aspheres: a step forward to nanometer accuracy, in Optical Metrology for the Semiconductor, Optical, and Data Storage Industries II / Proc. SPIE 4449 : 195 ~ 204
2. [학술지(정기간행물)] - C. Elster / 2002 / Reconstructing surface profiles from curvature measurements / Optik 113 (4) : 154 ~ 158
3. [학술대회논문] - B.C. Kim / 2004 / The Geometry Measuring Machine(GEMM) Project at NIST," in Free-Form Optics: Design, Fabrication, Metrology, Assembly / ASPE 2004 Winter Topical Meeting : 108 ~ 111
4. [학술지(정기간행물)] - U. Griesmann / 2005 / Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST, In Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II / Proc. SPIE 5878 : 112 ~ 124
5. [학술지(정기간행물)] - P.E. Glenn / 1990 / Angstrom level profilometry for submillimeter to meter scale surface errors, In Advanced Optical Manufacturing and Testing / Proc. SPIE 1333 : 326 ~ 336
2. [학술지(정기간행물)] - C. Elster / 2002 / Reconstructing surface profiles from curvature measurements / Optik 113 (4) : 154 ~ 158
3. [학술대회논문] - B.C. Kim / 2004 / The Geometry Measuring Machine(GEMM) Project at NIST," in Free-Form Optics: Design, Fabrication, Metrology, Assembly / ASPE 2004 Winter Topical Meeting : 108 ~ 111
4. [학술지(정기간행물)] - U. Griesmann / 2005 / Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST, In Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II / Proc. SPIE 5878 : 112 ~ 124
5. [학술지(정기간행물)] - P.E. Glenn / 1990 / Angstrom level profilometry for submillimeter to meter scale surface errors, In Advanced Optical Manufacturing and Testing / Proc. SPIE 1333 : 326 ~ 336
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UCI(KEPA) : I410-ECN-0101-2012-581-004459908