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학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
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연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2011.3
- 수록면
- 17 - 19 (3page)
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초록· 키워드
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The bubble oscillations play an important role in ultrasonic cleaning processes. In the ultrasonic cleaning of semiconductor wafers, the cleaning process often damages micro/nano scale patterns while removing contaminant particles. However, the understanding of how patterns in semiconductor wafers are damaged during ultrasonic cleaning is far from complete yet. Here, we report the observations of the motion of bubbles t ... 전체 초록 보기
목차
Abstract
1. 서론
2. 미세 기포 운동 가시화
3. 결론
후기
참고문헌
참고문헌 (6)
참고문헌 신청
1. [학술지(정기간행물)] - W. Kim / 2009 / Mechanism of particle removal by megasonic waves / Appl. Phys. Lett 94 : 081908 ~
2. [학술지(정기간행물)] - W. Lauterborn / 1985 / Cavitation bubble dynamics studied by high speed photography and holography: part one / Ultrasonics 23 (6) : 260 ~
3. [학술대회논문] - M. Versluis / 2004 / Microbubble surface modes / 2004 IEEE Ultrasonics Symposium : 207 ~
4. [학술지(정기간행물)] - C.D. Ohl / 2006 / Surface cleaning from laser-induced cavitation bubbles / Appl. Phys. Lett 89 : 074102 ~
5. [학술지(정기간행물)] - M. Versluis / 2010 / Microbubble shape oscillations excited through ultrasonic parametric driving / Phys. Rev. E 82 : 026321 ~
2. [학술지(정기간행물)] - W. Lauterborn / 1985 / Cavitation bubble dynamics studied by high speed photography and holography: part one / Ultrasonics 23 (6) : 260 ~
3. [학술대회논문] - M. Versluis / 2004 / Microbubble surface modes / 2004 IEEE Ultrasonics Symposium : 207 ~
4. [학술지(정기간행물)] - C.D. Ohl / 2006 / Surface cleaning from laser-induced cavitation bubbles / Appl. Phys. Lett 89 : 074102 ~
5. [학술지(정기간행물)] - M. Versluis / 2010 / Microbubble shape oscillations excited through ultrasonic parametric driving / Phys. Rev. E 82 : 026321 ~
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UCI(KEPA) : I410-ECN-0101-2012-505-004225375