지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 대한전기학회 Journal of Electrical Engineering & Technology Journal of Electrical Engineering & Technology Vol.6 No.1
- 발행연도
- 2011.1
- 수록면
- 119 - 122 (4page)
이용수
초록· 키워드
오류제보하기
A new high speed AFM probe has been proposed and fabricated. The probe is integrated with PZT actuated cantilever realized in bulk silicon wafer using heavily boron doped silicon as an etch stop layer. The cantilever thickness can be accurately controlled by the boron diffusion process. Thick SCS cantilever and integrated PZT actuator make it possible to be operated at high speed for fast imaging. The resonant frequency of the fabricated probe is 92.9 ㎑ and the maximum deflection is 5.3 ㎛ at 3 V. The fabricated probe successfully measured the surface of standard sample in an AFM system at the scan speed of 600㎛/sec
목차
Abstract
1. Introduction
2. Structure and Fabrication
3. Measurement Results
4. Conclusions
References
참고문헌 (7)
참고문헌 신청
B. Chui / 1998 / Lowstiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage / Journal of Microelectromechanical Systems :69
C. Mart n / 2005 / Nanolithography on thin layers of PMMA using atomic force microscopy / Nanotechnology :1016~1022
S. Sen / 2005 / Indentation and adhesive probing of a cell membrane with AFM: theoretical model and experiments / Biophysi-cal Journal 89(5):3203~3213
D. Fotiadis / 2005 / Imaging and manipulation of biological structures with the AFM / Micron 33(4):385~397
Y. Kim / 2003 / PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM / Sensors & Actuators: A. Physical :122~129
C. Mart n / 2005 / Nanolithography on thin layers of PMMA using atomic force microscopy / Nanotechnology :1016~1022
S. Sen / 2005 / Indentation and adhesive probing of a cell membrane with AFM: theoretical model and experiments / Biophysi-cal Journal 89(5):3203~3213
D. Fotiadis / 2005 / Imaging and manipulation of biological structures with the AFM / Micron 33(4):385~397
Y. Kim / 2003 / PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM / Sensors & Actuators: A. Physical :122~129
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UCI(KEPA) : I410-ECN-0101-2012-560-003839321