Characterization of Al-doped ZnO thin film grown on buffer layer with RF magnetron sputtering method

노영수 ,  이상엽 ,  김태환 외 1명

한국진공학회 학술발표회초록집

2009 .02

RF Magnetron Sputtering를 이용한 a축 ZnO:Al 박막의 구조적, 전기적 특성 연구

Junyoung Kang ,  Hyeongsik Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2015 .02

Structural and Electrical Properties of a-axis ZnO:Al Thin Films Grown by RF Magnetron Sputtering

봉성재 ,  김선보 ,  안시현 외 2명

한국진공학회 학술발표회초록집

2014 .02

Magnetic and Structural Studies on Fe Doped ZnO thin Films Deposited by RF Magnetron Sputtering

Soo-Young Seo ,  Chang-Ha Kwak ,  Seon-Hyo Kim

한국자기학회 학술연구발표회 논문개요집

2008 .12

The structural and electrical properties of annealing effect of Ga doped ZnO thin films on glass substrate grown by RF magnetron sputtering

J.S. Lee ,  H.H. Jeon ,  G.C. Kim 외 4명

한국진공학회 학술발표회초록집

2007 .08

Electrical and optical properties of Ga-doped ZnO thin films prepared by RF magnetron Co-sputtering systems

Nam-Jung KIM ,  Naeho SHIN ,  Chang-Su HWANG

한국진공학회 학술발표회초록집

2016 .08

The deposition temperature effects of ZnO buffer layers on the properties of ZnO:(Al,P) thin films by RF-magnetron sputtering

신승학 ,  이준형 ,  허영우 외 1명

한국진공학회 학술발표회초록집

2015 .02

Characteristics of Al Doped ZnO Thin Film by Modulated Pulsed Power Magnetron Sputtering

양원균 ,  주정훈

한국진공학회 학술발표회초록집

2012 .02

The effect of ZnO buffer layer on the structural and electrical properties in the ZnO:(Al,P) thin films by the RF-magnetron sputtering

김창훈 ,  신승학 ,  이준형 외 2명

한국진공학회 학술발표회초록집

2017 .02

Characterization of Al Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Under Various Substrate Temperatures

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2014 .09

Characteristics of Ga doped ZnO Thin Films Deposited by RF Magnetron Sputtering with Base Pressure

Deok Kyu Kim

Applied Science and Convergence Technology

2019 .01

X-Ray Absorption Spectroscopic Study of 120 MeV Ag⁹⁺ Ion-Irradiated N-Doped ZnO Thin Films

Sanjeev Gautam ,  Weon Cheol Lim ,  Hee Kyung Kang 외 5명

한국진공학회 학술발표회초록집

2013 .02

RF - Magnetron co - sputtering법으로 제작한 ZnO : Fe 박막의 강자성 원인연구

유장현 ,  권순주

한국자기학회 학술연구발표회 논문개요집

2005 .12

Properties of ZnO:Ga thin films deposited by RF magnetron sputtering under various RF power

Deok Kyu Kim ,  Hong Bae Kim

Applied Science and Convergence Technology

2015 .11

Effect of post heat-treatment on microstructure and dielectric properties of Ba_0.5Sr_0.5TiO₃ thin films by RF magnetron sputtering

Chil-Hyoung Lee ,  Doo-Jin Choi ,  Young-Jei Oh

한국진공학회 학술발표회초록집

2009 .02

RF magnetron sputtering 법으로 제조한 ZnO 박막의 RF 파워에 따른 특성

김종욱 ,  김민석 ,  이인환 외 4명

한국진공학회 학술발표회초록집

2009 .02

Effect of growth temperature of Ga doped ZnO thin films by pulsed DC magnetron sputtering

Juho Kim ,  Ki-Seok An ,  Sun Sook Lee 외 2명

한국진공학회 학술발표회초록집

2009 .02

The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

G.C. Kim ,  H.H Jeon ,  S.J. Hwangboe 외 4명

한국진공학회 학술발표회초록집

2007 .08

Enhancement of photoluminescence and electrical properties of Ga - doped ZnO thin film grown on α - Al₂O₃(0001) single crystal substrate by RF magnetron sputtering through rapid thermal annealing

Jung-Cho ,  Jongbum Nah ,  Min-Seok Oh 외 3명

한국진공학회 학술발표회초록집

2001 .07

후열처리에 따른 스퍼터된 ZnO : Al 박막의 전기적, 광학적 특성

김덕규 ,  김홍배

Applied Science and Convergence Technology

2013 .01