지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2009.3
- 수록면
- 75 - 79 (5page)
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초록· 키워드
오류제보하기
A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a 1 ㎛ peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A 1 ㎛ pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).
목차
Ⅰ. INTRODUCTION
Ⅱ. EXPERIMENTAL CONDITION
Ⅲ. EXPERIMENT RESULTS AND DISCUSSION
Ⅳ. CONCLUSION
ACKNOWLEDGMENT
REFERENCES
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