지원사업
학술연구/단체지원/교육 등 연구자 활동을 지속하도록 DBpia가 지원하고 있어요.
커뮤니티
연구자들이 자신의 연구와 전문성을 널리 알리고, 새로운 협력의 기회를 만들 수 있는 네트워킹 공간이에요.
논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 발행연도
- 2006.3
- 수록면
- 48 - 54 (7page)
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초록· 키워드
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White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces (Rα?500 ㎚), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 ㎚ to 300 ㎚ range of Rα, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.
목차
Abstract
Ⅰ. INTRODUCTION
Ⅱ. SAMPLES MEASURED
Ⅲ. MEASUREMENT CONDITIONS
Ⅳ. EXPERIMENTAL RESULTS
Ⅴ. DIFFRACTION MODEL
Ⅵ. DISCUSSION AND CONCLUSION
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UCI(KEPA) : I410-ECN-0101-2009-425-015411489