Chemical Vapor Deposition with Single Precursors

Yunsoo Kim

한국진공학회 학술발표회초록집

1991 .07

Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates

Doo Hyun Kim ,  Seung Ho Yoo ,  Ki-Seok An 외 3명

한국진공학회 학술발표회초록집

2001 .02

Photoluminescence properties of a-plane GaN by metal-organic chemical vapor deposition

서용곤 ,  박재현 ,  서문석 외 3명

한국진공학회 학술발표회초록집

2009 .02

The growth of high quality GaN thin films on Si(111) grown by ultrahigh vacuum chemical vapor deposition

방영철 ,  김민호 ,  박성주

한국진공학회 학술발표회초록집

2000 .07

Characteristics of a-plane GaN buffer layers on r-plane sapphire substrate grown by metal-organic chemical vapor deposition

송후영 ,  김은규 ,  김재범 외 1명

한국진공학회 학술발표회초록집

2008 .08

Growth of carbon nanotubes on metal substrates using plasma - enhanced chemical vapor deposition

Se ,  ng-Ye ,  l Pa 외 9명

한국진공학회 학술발표회초록집

2002 .06

Cu film growth on Si substrate by combining plasma enhanced chemical vapor deposition with partially ionized beam deposition

K. H. Kim ,  S. C. Choi ,  D. J. Choi 외 5명

한국진공학회 학술발표회초록집

1997 .07

Growth of Highly Oriented Diamond Films by Microwave Plasma Chemical Vapor Deposition

Kwang-Man Lee ,  Chi Kyu Choi ,  Zlatko Sita

한국진공학회 학술발표회초록집

2003 .08

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Growth of vertically aligned carbon nanotubes on a large area Si substrates by thermal chemical vapor deposition

Cheol Jin Lee ,  Jung Hoon Pa ,  k 외 4명

한국진공학회 학술발표회초록집

2000 .02

Growth of TiO₂ Thin Films on Si(100) and Si(111) Substrates Using Single Molecular Precursor by MOCVD and Comparision of Growth Mechanism and Structural Properties

C.-K. Jung ,  B.-C. Kang ,  H.-Y. Chae 외 2명

한국진공학회 학술발표회초록집

2001 .02

Preparation of Zn_1-xMn_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Min-Seok CHOI ,  Choon-Ho LEE

한국진공학회 학술발표회초록집

2016 .08

Preparation of Ga_0.03Zn_0.97-xMg_xO thin films by metal-organic chemical vapor deposition using ultrasonic nebulization

Choon-Ho LEE ,  Min-Seok CHOI

한국진공학회 학술발표회초록집

2016 .08

Deposition of MgB2 Thin Films by using of Chemical Vapor Deposition

이정욱 ,  박규순 ,  남궁해 외 1명

한국진공학회 학술발표회초록집

2002 .06

Epitaxial growth of MoS₂ on c-sapphire by metal-organic chemical vapor deposition

Hokwon KIM ,  Dmit ,  y OVCHINNIKOV 외 4명

한국진공학회 학술발표회초록집

2016 .08

Growth behavior and structural properties of titanium dioxide thin films on Si(100) and Si(111) substrates using single molecular precursor by high vacuum MOCVD

C. -K. Jung ,  B.-C. Kang ,  H.-Y. Chae 외 7명

한국진공학회 학술발표회초록집

2001 .07

Growth of GaN Films on Si with a LiGaO₂ Buffer Layer by Single Precursor MOCVD

한성원 ,  임종태 ,  유승호 외 3명

한국진공학회 학술발표회초록집

2001 .02

The Study on Synthesis and Characterization of Various Functional Materials by Physical Vapor Deposition and Chemical Vapor Deposition method

송용화 ,  조상진 ,  정충경 외 1명

한국진공학회 학술발표회초록집

2006 .02

Preparation of High Quality RuO₂ Electrodes for High Dielectric Thin Films by Low Pressure Metal Organic Chemical Vapor Deposition

J. M. Lee ,  H. J. Kim ,  C. S. Hwang 외 1명

한국진공학회 학술발표회초록집

1997 .07

Cu growth on hydrogen plasma treated Cu by metal organic chemical vapor deposition

Hock Key Moon ,  Nae-Eung Lee

한국진공학회 학술발표회초록집

2009 .02