Analysis of Si-, O- and H- bonding effect at Si-SiO₂ interface for c-Si surface passivation quality by thermal oxidation

Jiyoon KANG ,  Minhan JEON ,  Donghyun OH 외 5명

한국진공학회 학술발표회초록집

2016 .08

In-situ magnetization measurements and ex-situ morphological analysis of electrodeposited cobalt onto chemical vapor deposition graphene/SiO₂/Si

F ,  anco ,  Vinicius C. De 외 10명

Carbon letters

2017 .01

Chemical Vapor Deposition of Ga₂O₃ Thin Films on Si Substrates

Doo Hyun Kim ,  Seung Ho Yoo ,  Ki-Seok An 외 3명

한국진공학회 학술발표회초록집

2001 .02

Cu film growth on Si substrate by combining plasma enhanced chemical vapor deposition with partially ionized beam deposition

K. H. Kim ,  S. C. Choi ,  D. J. Choi 외 5명

한국진공학회 학술발표회초록집

1997 .07

Characterization of Low-Temperature Graphene Growth with Plasma Enhanced Chemical Vapor Deposition

Yifei Ma ,  Daekyoung Kim ,  Guoqing Xin 외 1명

한국진공학회 학술발표회초록집

2012 .02

Growth of vertically aligned carbon nanotubes on a large area Si substrates by thermal chemical vapor deposition

Cheol Jin Lee ,  Jung Hoon Pa ,  k 외 4명

한국진공학회 학술발표회초록집

2000 .02

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Optical emission spectroscopic study of reactive species during remote plasma - enhanced chemical vapor deposition of GaN

손철수 ,  윤의준

한국진공학회 학술발표회초록집

1997 .07

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Investigation of electron beam irradiation effect of carbon nanotubes on Ni coated Si (100) substrate by microwave plasma - enhanced chemical vapor deposition

Ji Hoon Yang ,  Sang Hyun Moon ,  In Wha Lee 외 8명

한국진공학회 학술발표회초록집

2002 .06

Synthesis of Graphene by Plasma Enhanced Chemical Vapor Deposition and Its transfer for Device Application

서동익 ,  한정윤 ,  김언정 외 1명

한국진공학회 학술발표회초록집

2010 .08

Effect of SiF₄ addition on the structures of silicon films deposited at low temperature by remote plasma enhanced chemical vapor deposition

Xiaodong Li ,  Young-Bae Pa ,  k 외 2명

한국진공학회 학술발표회초록집

1995 .06

Plasma Enhanced Chemical Vapor Deposition 을 이용한 TiO₂ 박막의 증착 및 특성 연구

이원규 ,  우성일

한국진공학회 학술발표회초록집

1993 .02

Thermal Chemical Vapor Deposition of Graphene Layers

Kyoeng-Woo Kwon ,  Woo-Ri Do ,  Jinha Hwang

한국진공학회 학술발표회초록집

2013 .02

Metal nanowires formed on high - index Si surfaces : Bi / Si(5 5 12) vs Ag/ Si(5 5 12)

S. H. Cho ,  J. M. Seo

한국진공학회 학술발표회초록집

2004 .08

Multilayer barrier film fabricated by Plasma Enhanced Chemical Vapor Deposition and Atomic Layer Deposition

Chang-Kyu Jin ,  Do-Kyung Hwang ,  Tae-Hwan Kim 외 1명

한국진공학회 학술발표회초록집

2014 .08

Growth of carbon nanotubes on metal substrates using plasma - enhanced chemical vapor deposition

Se ,  ng-Ye ,  l Pa 외 9명

한국진공학회 학술발표회초록집

2002 .06

Inorganic Thin Film Passivation Layer Fabricated by Plasma Enhanced Chemical Vapor Deposition

Bum-Hee Lee ,  Dong-Hee Pa ,  k 외 3명

한국진공학회 학술발표회초록집

2013 .02

First - principles study of the initial - stage oxidation of Si(111) - (7×7)

Sung-Hoon Lee ,  Myung-Ho Kang

한국진공학회 학술발표회초록집

2000 .02